Raise the flop after you check and they bet.
Raise the turn HARDER
Bet the river. What are you doing checking here? You already check-raised once; do you really think you'll be able to do it twice.
And unless this was some sort of wierd limit game (which doesn't belong in this forum), I don't know why you bet so little when you did bet. You're not destroying odds for anyone; in fact, you're giving them great odds to go ahead and chase and then destack you if they hit.