min raise preflop can mean a lot of things and you give him decent implied odds, raise harder, making his error in calling bigger.

Flop is wet, villain can make this play with 67s so 15 out draw is possible, so again bet larger, making his error bigger.

betting thinly on the river is debatable, depends heavily on the player, your guy is either a station with a flush or straight, or he's a slow rolling douche with a set. I hate this situation, getting stuck out of position with loads of made hands in villains range. Also think that if you bet stronger on all previous streets you make yourself look more committed meaning that bluffing you would be a stupid idea because its a cheap call for you.

As played I think you have to fold.