Heads on tournament

I was dealt 62o.
Opponent was dealt QQ
Both check

Flop comes
5s 6c 9h

I bet 180
He raises 320
I call

Turn comes
6h

I bet 320
He raises 640
I raise all in
He calls

River comes
10h

In conclusion I win 666 over QQ

That was the tourney winner and the reason that guy lost.. If he would have raised me harder, he would have folded me out and had a better chance of winning the tourney.